12/9/2011	9:27:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/9/2011	9:27:18 AM	Recipe started at 9:27 AM
12/9/2011	9:27:18 AM	Helium valve closed
12/9/2011	9:27:18 AM	H2 valve closed
12/9/2011	9:27:18 AM	BCl3 valve closed
12/9/2011	9:27:18 AM	PH3 valve closed
12/9/2011	9:27:18 AM	SiCl4 pre valve closed
12/9/2011	9:27:18 AM	SiCl4 post valve closed
12/9/2011	9:27:18 AM	Main Vac valve closed
12/9/2011	9:27:18 AM	Bypass valve closed
12/9/2011	9:27:18 AM	Bubbler valve closed
12/9/2011	9:27:18 AM	Helium MFC set to  0.000000
12/9/2011	9:27:18 AM	H2 MFC set to  0.000000
12/9/2011	9:27:19 AM	BCl3 MFC set to  0.000000
12/9/2011	9:27:19 AM	PHl3 MFC set to  0.000000
12/9/2011	9:27:19 AM	SiCl4 MFC set to  0.000000
12/9/2011	9:27:19 AM	Bypass solenoid MFC set to  0.000000
12/9/2011	9:27:19 AM	Tube furnace set to 0
12/9/2011	9:27:22 AM	H2 valve closed
12/9/2011	9:27:22 AM	BCl3 valve closed
12/9/2011	9:27:22 AM	PH3 valve closed
12/9/2011	9:27:22 AM	SiCl4 pre valve closed
12/9/2011	9:27:22 AM	SiCl4 post valve closed
12/9/2011	9:27:22 AM	Main Vac valve closed
12/9/2011	9:27:22 AM	Bypass valve closed
12/9/2011	9:27:22 AM	Bubbler valve closed
12/9/2011	9:27:22 AM	Helium valve opened
12/9/2011	9:27:22 AM	Helium MFC set to  500.000000
12/9/2011	9:27:22 AM	H2 MFC set to  0.000000
12/9/2011	9:27:22 AM	BCl3 MFC set to  0.000000
12/9/2011	9:27:22 AM	PHl3 MFC set to  0.000000
12/9/2011	9:27:22 AM	SiCl4 MFC set to  0.000000
12/9/2011	9:27:22 AM	Bypass solenoid MFC set to  0.000000
12/9/2011	9:27:22 AM	Tube furnace set to 0
12/9/2011	9:28:27 AM	Helium valve closed
12/9/2011	9:28:27 AM	H2 valve closed
12/9/2011	9:28:27 AM	BCl3 valve closed
12/9/2011	9:28:27 AM	PH3 valve closed
12/9/2011	9:28:27 AM	SiCl4 pre valve closed
12/9/2011	9:28:27 AM	SiCl4 post valve closed
12/9/2011	9:28:27 AM	Main Vac valve closed
12/9/2011	9:28:27 AM	Bypass valve closed
12/9/2011	9:28:27 AM	Bubbler valve closed
12/9/2011	9:28:27 AM	Helium MFC set to  0.000000
12/9/2011	9:28:27 AM	H2 MFC set to  0.000000
12/9/2011	9:28:27 AM	BCl3 MFC set to  0.000000
12/9/2011	9:28:27 AM	PHl3 MFC set to  0.000000
12/9/2011	9:28:27 AM	SiCl4 MFC set to  0.000000
12/9/2011	9:28:27 AM	Bypass solenoid MFC set to  0.000000
12/9/2011	9:28:27 AM	Tube furnace set to 0
12/9/2011	9:28:28 AM	Run finished at 9:28 AM
12/9/2011	9:28:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/9/2011	9:44:01 AM	Bypass valve opened
12/9/2011	9:45:44 AM	Bypass valve closed
12/9/2011	9:45:45 AM	Main Vac valve opened
12/9/2011	9:46:33 AM	Helium MFC set to  20.000000
12/9/2011	9:46:34 AM	Helium valve opened
12/9/2011	9:48:35 AM	Helium valve closed
12/9/2011	9:49:10 AM	Helium valve opened
12/9/2011	9:49:38 AM	Helium valve closed
12/9/2011	9:49:59 AM	Helium valve opened
12/9/2011	9:50:21 AM	Helium valve closed
12/9/2011	9:50:47 AM	Recipe started at 9:50 AM
12/9/2011	9:50:47 AM	Helium valve closed
12/9/2011	9:50:47 AM	H2 valve closed
12/9/2011	9:50:47 AM	BCl3 valve closed
12/9/2011	9:50:47 AM	PH3 valve closed
12/9/2011	9:50:47 AM	SiCl4 pre valve closed
12/9/2011	9:50:47 AM	SiCl4 post valve closed
12/9/2011	9:50:47 AM	Bypass valve closed
12/9/2011	9:50:47 AM	Bubbler valve closed
12/9/2011	9:50:47 AM	Main Vac valve opened
12/9/2011	9:50:47 AM	Helium MFC set to  0.000000
12/9/2011	9:50:47 AM	H2 MFC set to  0.000000
12/9/2011	9:50:47 AM	BCl3 MFC set to  0.000000
12/9/2011	9:50:47 AM	PHl3 MFC set to  0.000000
12/9/2011	9:50:47 AM	SiCl4 MFC set to  0.000000
12/9/2011	9:50:47 AM	Bypass solenoid MFC set to  0.000000
12/9/2011	9:50:47 AM	Tube furnace set to 0
12/9/2011	10:50:47 AM	Helium valve closed
12/9/2011	10:50:47 AM	H2 valve closed
12/9/2011	10:50:47 AM	BCl3 valve closed
12/9/2011	10:50:47 AM	PH3 valve closed
12/9/2011	10:50:47 AM	SiCl4 pre valve closed
12/9/2011	10:50:47 AM	SiCl4 post valve closed
12/9/2011	10:50:47 AM	Main Vac valve closed
12/9/2011	10:50:47 AM	Bypass valve closed
12/9/2011	10:50:47 AM	Bubbler valve closed
12/9/2011	10:50:47 AM	Helium MFC set to  0.000000
12/9/2011	10:50:47 AM	H2 MFC set to  0.000000
12/9/2011	10:50:47 AM	BCl3 MFC set to  0.000000
12/9/2011	10:50:47 AM	PHl3 MFC set to  0.000000
12/9/2011	10:50:47 AM	SiCl4 MFC set to  0.000000
12/9/2011	10:50:47 AM	Bypass solenoid MFC set to  0.000000
12/9/2011	10:50:48 AM	Tube furnace set to 0
12/9/2011	10:50:51 AM	Helium valve closed
12/9/2011	10:50:51 AM	BCl3 valve closed
12/9/2011	10:50:51 AM	PH3 valve closed
12/9/2011	10:50:51 AM	SiCl4 pre valve closed
12/9/2011	10:50:51 AM	SiCl4 post valve closed
12/9/2011	10:50:51 AM	Main Vac valve closed
12/9/2011	10:50:51 AM	Bypass valve closed
12/9/2011	10:50:51 AM	Bubbler valve closed
12/9/2011	10:50:51 AM	H2 valve opened
12/9/2011	10:50:51 AM	Helium MFC set to  0.000000
12/9/2011	10:50:51 AM	H2 MFC set to  500.000000
12/9/2011	10:50:51 AM	BCl3 MFC set to  0.000000
12/9/2011	10:50:51 AM	PHl3 MFC set to  0.000000
12/9/2011	10:50:51 AM	SiCl4 MFC set to  0.000000
12/9/2011	10:50:51 AM	Bypass solenoid MFC set to  0.000000
12/9/2011	10:50:51 AM	Tube furnace set to 50
12/9/2011	10:51:59 AM	Helium valve closed
12/9/2011	10:51:59 AM	BCl3 valve closed
12/9/2011	10:51:59 AM	PH3 valve closed
12/9/2011	10:51:59 AM	SiCl4 pre valve closed
12/9/2011	10:51:59 AM	SiCl4 post valve closed
12/9/2011	10:51:59 AM	Main Vac valve closed
12/9/2011	10:51:59 AM	Bypass valve closed
12/9/2011	10:51:59 AM	H2 valve opened
12/9/2011	10:51:59 AM	Bubbler valve opened
12/9/2011	10:51:59 AM	Helium MFC set to  0.000000
12/9/2011	10:51:59 AM	H2 MFC set to  500.000000
12/9/2011	10:51:59 AM	BCl3 MFC set to  0.000000
12/9/2011	10:51:59 AM	PHl3 MFC set to  0.000000
12/9/2011	10:51:59 AM	SiCl4 MFC set to  0.000000
12/9/2011	10:51:59 AM	Bypass solenoid MFC set to  0.000000
12/9/2011	10:51:59 AM	Tube furnace set to 50
12/9/2011	10:52:00 AM	Helium valve closed
12/9/2011	10:52:00 AM	BCl3 valve closed
12/9/2011	10:52:00 AM	PH3 valve closed
12/9/2011	10:52:00 AM	SiCl4 pre valve closed
12/9/2011	10:52:00 AM	SiCl4 post valve closed
12/9/2011	10:52:00 AM	Main Vac valve closed
12/9/2011	10:52:00 AM	Bypass valve closed
12/9/2011	10:52:00 AM	H2 valve opened
12/9/2011	10:52:00 AM	Bubbler valve opened
12/9/2011	10:52:00 AM	Helium MFC set to  0.000000
12/9/2011	10:52:00 AM	H2 MFC set to  500.000000
12/9/2011	10:52:00 AM	BCl3 MFC set to  0.000000
12/9/2011	10:52:00 AM	PHl3 MFC set to  0.000000
12/9/2011	10:52:00 AM	SiCl4 MFC set to  0.000000
12/9/2011	10:52:00 AM	Bypass solenoid MFC set to  0.000000
12/9/2011	10:52:00 AM	Tube furnace set to 1000
12/9/2011	11:15:00 AM	Helium valve closed
12/9/2011	11:15:00 AM	BCl3 valve closed
12/9/2011	11:15:00 AM	Main Vac valve closed
12/9/2011	11:15:00 AM	Bypass valve closed
12/9/2011	11:15:00 AM	H2 valve opened
12/9/2011	11:15:00 AM	PH3 valve opened
12/9/2011	11:15:00 AM	SiCl4 pre valve opened
12/9/2011	11:15:00 AM	SiCl4 post valve opened
12/9/2011	11:15:00 AM	Bubbler valve opened
12/9/2011	11:15:00 AM	Helium MFC set to  0.000000
12/9/2011	11:15:00 AM	H2 MFC set to  495.000000
12/9/2011	11:15:00 AM	BCl3 MFC set to  0.000000
12/9/2011	11:15:00 AM	PHl3 MFC set to  1.000000
12/9/2011	11:15:00 AM	SiCl4 MFC set to  30.000000
12/9/2011	11:15:00 AM	Bypass solenoid MFC set to  0.000000
12/9/2011	11:15:00 AM	Tube furnace set to 1000
12/9/2011	11:55:00 AM	Helium valve closed
12/9/2011	11:55:00 AM	BCl3 valve closed
12/9/2011	11:55:00 AM	PH3 valve closed
12/9/2011	11:55:00 AM	SiCl4 pre valve closed
12/9/2011	11:55:00 AM	SiCl4 post valve closed
12/9/2011	11:55:00 AM	Main Vac valve closed
12/9/2011	11:55:00 AM	Bypass valve closed
12/9/2011	11:55:00 AM	H2 valve opened
12/9/2011	11:55:00 AM	Bubbler valve opened
12/9/2011	11:55:00 AM	Helium MFC set to  0.000000
12/9/2011	11:55:00 AM	H2 MFC set to  480.000000
12/9/2011	11:55:00 AM	BCl3 MFC set to  0.000000
12/9/2011	11:55:00 AM	PHl3 MFC set to  0.000000
12/9/2011	11:55:00 AM	SiCl4 MFC set to  0.000000
12/9/2011	11:55:00 AM	Bypass solenoid MFC set to  0.000000
12/9/2011	11:55:01 AM	Tube furnace set to 750
12/9/2011	12:05:01 PM	H2 valve closed
12/9/2011	12:05:01 PM	BCl3 valve closed
12/9/2011	12:05:01 PM	PH3 valve closed
12/9/2011	12:05:01 PM	SiCl4 pre valve closed
12/9/2011	12:05:01 PM	SiCl4 post valve closed
12/9/2011	12:05:01 PM	Main Vac valve closed
12/9/2011	12:05:01 PM	Bypass valve closed
12/9/2011	12:05:01 PM	Helium valve opened
12/9/2011	12:05:01 PM	Bubbler valve opened
12/9/2011	12:05:01 PM	Helium MFC set to  400.000000
12/9/2011	12:05:01 PM	H2 MFC set to  0.000000
12/9/2011	12:05:01 PM	BCl3 MFC set to  0.000000
12/9/2011	12:05:01 PM	PHl3 MFC set to  0.000000
12/9/2011	12:05:01 PM	SiCl4 MFC set to  0.000000
12/9/2011	12:05:01 PM	Bypass solenoid MFC set to  0.000000
12/9/2011	12:05:01 PM	Tube furnace set to 0
12/9/2011	12:30:01 PM	Helium valve closed
12/9/2011	12:30:01 PM	H2 valve closed
12/9/2011	12:30:01 PM	BCl3 valve closed
12/9/2011	12:30:01 PM	PH3 valve closed
12/9/2011	12:30:01 PM	SiCl4 pre valve closed
12/9/2011	12:30:01 PM	SiCl4 post valve closed
12/9/2011	12:30:01 PM	Main Vac valve closed
12/9/2011	12:30:01 PM	Bypass valve closed
12/9/2011	12:30:01 PM	Bubbler valve closed
12/9/2011	12:30:01 PM	Helium MFC set to  0.000000
12/9/2011	12:30:01 PM	H2 MFC set to  0.000000
12/9/2011	12:30:01 PM	BCl3 MFC set to  0.000000
12/9/2011	12:30:01 PM	PHl3 MFC set to  0.000000
12/9/2011	12:30:01 PM	SiCl4 MFC set to  0.000000
12/9/2011	12:30:01 PM	Bypass solenoid MFC set to  0.000000
12/9/2011	12:30:01 PM	Tube furnace set to 50
12/9/2011	12:35:01 PM	Helium valve closed
12/9/2011	12:35:01 PM	H2 valve closed
12/9/2011	12:35:01 PM	BCl3 valve closed
12/9/2011	12:35:01 PM	PH3 valve closed
12/9/2011	12:35:01 PM	SiCl4 pre valve closed
12/9/2011	12:35:01 PM	SiCl4 post valve closed
12/9/2011	12:35:01 PM	Main Vac valve closed
12/9/2011	12:35:01 PM	Bubbler valve closed
12/9/2011	12:35:01 PM	Bypass valve opened
12/9/2011	12:35:01 PM	Helium MFC set to  0.000000
12/9/2011	12:35:01 PM	H2 MFC set to  0.000000
12/9/2011	12:35:01 PM	BCl3 MFC set to  0.000000
12/9/2011	12:35:01 PM	PHl3 MFC set to  0.000000
12/9/2011	12:35:01 PM	SiCl4 MFC set to  0.000000
12/9/2011	12:35:01 PM	Bypass solenoid MFC set to  0.000000
12/9/2011	12:35:01 PM	Tube furnace set to 0
12/9/2011	12:40:01 PM	Helium valve closed
12/9/2011	12:40:01 PM	H2 valve closed
12/9/2011	12:40:01 PM	BCl3 valve closed
12/9/2011	12:40:01 PM	PH3 valve closed
12/9/2011	12:40:01 PM	SiCl4 pre valve closed
12/9/2011	12:40:01 PM	SiCl4 post valve closed
12/9/2011	12:40:01 PM	Bypass valve closed
12/9/2011	12:40:01 PM	Bubbler valve closed
12/9/2011	12:40:01 PM	Main Vac valve opened
12/9/2011	12:40:01 PM	Helium MFC set to  0.000000
12/9/2011	12:40:01 PM	H2 MFC set to  0.000000
12/9/2011	12:40:01 PM	BCl3 MFC set to  0.000000
12/9/2011	12:40:01 PM	PHl3 MFC set to  0.000000
12/9/2011	12:40:01 PM	SiCl4 MFC set to  0.000000
12/9/2011	12:40:01 PM	Bypass solenoid MFC set to  0.000000
12/9/2011	12:40:01 PM	Tube furnace set to 0
12/9/2011	12:40:02 PM	Run finished at 12:40 PM
12/9/2011	1:05:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/9/2011	1:05:34 PM	Recipe started at 1:05 PM
12/9/2011	1:05:34 PM	Helium valve closed
12/9/2011	1:05:34 PM	H2 valve closed
12/9/2011	1:05:34 PM	BCl3 valve closed
12/9/2011	1:05:34 PM	PH3 valve closed
12/9/2011	1:05:34 PM	SiCl4 pre valve closed
12/9/2011	1:05:34 PM	SiCl4 post valve closed
12/9/2011	1:05:34 PM	Main Vac valve closed
12/9/2011	1:05:34 PM	Bypass valve closed
12/9/2011	1:05:34 PM	Bubbler valve closed
12/9/2011	1:05:34 PM	Helium MFC set to  0.000000
12/9/2011	1:05:34 PM	H2 MFC set to  0.000000
12/9/2011	1:05:34 PM	BCl3 MFC set to  0.000000
12/9/2011	1:05:34 PM	PHl3 MFC set to  0.000000
12/9/2011	1:05:34 PM	SiCl4 MFC set to  0.000000
12/9/2011	1:05:34 PM	Bypass solenoid MFC set to  0.000000
12/9/2011	1:05:34 PM	Tube furnace set to 0
12/9/2011	1:05:37 PM	H2 valve closed
12/9/2011	1:05:37 PM	BCl3 valve closed
12/9/2011	1:05:37 PM	PH3 valve closed
12/9/2011	1:05:37 PM	SiCl4 pre valve closed
12/9/2011	1:05:37 PM	SiCl4 post valve closed
12/9/2011	1:05:37 PM	Main Vac valve closed
12/9/2011	1:05:37 PM	Bypass valve closed
12/9/2011	1:05:37 PM	Bubbler valve closed
12/9/2011	1:05:37 PM	Helium valve opened
12/9/2011	1:05:37 PM	Helium MFC set to  500.000000
12/9/2011	1:05:37 PM	H2 MFC set to  0.000000
12/9/2011	1:05:37 PM	BCl3 MFC set to  0.000000
12/9/2011	1:05:37 PM	PHl3 MFC set to  0.000000
12/9/2011	1:05:37 PM	SiCl4 MFC set to  0.000000
12/9/2011	1:05:37 PM	Bypass solenoid MFC set to  0.000000
12/9/2011	1:05:37 PM	Tube furnace set to 0
12/9/2011	1:06:35 PM	Helium valve closed
12/9/2011	1:06:35 PM	H2 valve closed
12/9/2011	1:06:35 PM	BCl3 valve closed
12/9/2011	1:06:35 PM	PH3 valve closed
12/9/2011	1:06:35 PM	SiCl4 pre valve closed
12/9/2011	1:06:35 PM	SiCl4 post valve closed
12/9/2011	1:06:35 PM	Main Vac valve closed
12/9/2011	1:06:35 PM	Bypass valve closed
12/9/2011	1:06:35 PM	Bubbler valve closed
12/9/2011	1:06:35 PM	Helium MFC set to  0.000000
12/9/2011	1:06:35 PM	H2 MFC set to  0.000000
12/9/2011	1:06:35 PM	BCl3 MFC set to  0.000000
12/9/2011	1:06:35 PM	PHl3 MFC set to  0.000000
12/9/2011	1:06:35 PM	SiCl4 MFC set to  0.000000
12/9/2011	1:06:35 PM	Bypass solenoid MFC set to  0.000000
12/9/2011	1:06:35 PM	Tube furnace set to 0
12/9/2011	1:06:36 PM	Run finished at 1:06 PM
12/9/2011	1:06:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/9/2011	1:09:35 PM	Bypass valve opened
12/9/2011	1:10:38 PM	Bypass valve closed
12/9/2011	1:10:39 PM	Main Vac valve opened
12/9/2011	1:10:51 PM	Helium MFC set to  20.000000
12/9/2011	1:10:53 PM	Helium valve opened
12/9/2011	1:17:05 PM	Helium valve closed
12/9/2011	1:28:51 PM	Main Vac valve closed
12/9/2011	1:29:01 PM	Main Vac valve opened
12/9/2011	1:29:04 PM	Helium valve opened
12/9/2011	1:29:37 PM	Helium valve closed
12/9/2011	1:30:52 PM	Main Vac valve closed
12/9/2011	1:31:13 PM	Helium valve opened
12/9/2011	1:31:28 PM	Helium valve closed
12/9/2011	1:31:32 PM	Bypass valve opened
12/9/2011	1:31:54 PM	Bypass valve closed
12/9/2011	1:31:54 PM	Main Vac valve opened
12/9/2011	1:40:01 PM	Main Vac valve closed
12/9/2011	1:40:10 PM	Main Vac valve opened
12/9/2011	1:40:39 PM	Recipe started at 1:40 PM
12/9/2011	1:40:39 PM	Helium valve closed
12/9/2011	1:40:39 PM	H2 valve closed
12/9/2011	1:40:39 PM	BCl3 valve closed
12/9/2011	1:40:39 PM	PH3 valve closed
12/9/2011	1:40:39 PM	SiCl4 pre valve closed
12/9/2011	1:40:39 PM	SiCl4 post valve closed
12/9/2011	1:40:39 PM	Bypass valve closed
12/9/2011	1:40:39 PM	Bubbler valve closed
12/9/2011	1:40:39 PM	Main Vac valve opened
12/9/2011	1:40:39 PM	Helium MFC set to  0.000000
12/9/2011	1:40:39 PM	H2 MFC set to  0.000000
12/9/2011	1:40:39 PM	BCl3 MFC set to  0.000000
12/9/2011	1:40:39 PM	PHl3 MFC set to  0.000000
12/9/2011	1:40:39 PM	SiCl4 MFC set to  0.000000
12/9/2011	1:40:39 PM	Bypass solenoid MFC set to  0.000000
12/9/2011	1:40:39 PM	Tube furnace set to 0
12/9/2011	1:41:10 PM	Helium valve closed
12/9/2011	1:41:10 PM	H2 valve closed
12/9/2011	1:41:10 PM	BCl3 valve closed
12/9/2011	1:41:10 PM	PH3 valve closed
12/9/2011	1:41:10 PM	SiCl4 pre valve closed
12/9/2011	1:41:10 PM	SiCl4 post valve closed
12/9/2011	1:41:10 PM	Main Vac valve closed
12/9/2011	1:41:10 PM	Bypass valve closed
12/9/2011	1:41:10 PM	Bubbler valve closed
12/9/2011	1:41:10 PM	Helium MFC set to  0.000000
12/9/2011	1:41:10 PM	H2 MFC set to  0.000000
12/9/2011	1:41:10 PM	BCl3 MFC set to  0.000000
12/9/2011	1:41:10 PM	PHl3 MFC set to  0.000000
12/9/2011	1:41:10 PM	SiCl4 MFC set to  0.000000
12/9/2011	1:41:10 PM	Bypass solenoid MFC set to  0.000000
12/9/2011	1:41:10 PM	Tube furnace set to 0
12/9/2011	1:41:13 PM	Helium valve closed
12/9/2011	1:41:13 PM	BCl3 valve closed
12/9/2011	1:41:13 PM	PH3 valve closed
12/9/2011	1:41:13 PM	SiCl4 pre valve closed
12/9/2011	1:41:13 PM	SiCl4 post valve closed
12/9/2011	1:41:13 PM	Main Vac valve closed
12/9/2011	1:41:13 PM	Bypass valve closed
12/9/2011	1:41:13 PM	Bubbler valve closed
12/9/2011	1:41:13 PM	H2 valve opened
12/9/2011	1:41:13 PM	Helium MFC set to  0.000000
12/9/2011	1:41:13 PM	H2 MFC set to  500.000000
12/9/2011	1:41:13 PM	BCl3 MFC set to  0.000000
12/9/2011	1:41:13 PM	PHl3 MFC set to  0.000000
12/9/2011	1:41:13 PM	SiCl4 MFC set to  0.000000
12/9/2011	1:41:13 PM	Bypass solenoid MFC set to  0.000000
12/9/2011	1:41:13 PM	Tube furnace set to 50
12/9/2011	1:42:16 PM	Helium valve closed
12/9/2011	1:42:16 PM	BCl3 valve closed
12/9/2011	1:42:16 PM	PH3 valve closed
12/9/2011	1:42:16 PM	SiCl4 pre valve closed
12/9/2011	1:42:16 PM	SiCl4 post valve closed
12/9/2011	1:42:16 PM	Main Vac valve closed
12/9/2011	1:42:16 PM	Bypass valve closed
12/9/2011	1:42:16 PM	H2 valve opened
12/9/2011	1:42:16 PM	Bubbler valve opened
12/9/2011	1:42:16 PM	Helium MFC set to  0.000000
12/9/2011	1:42:16 PM	H2 MFC set to  500.000000
12/9/2011	1:42:16 PM	BCl3 MFC set to  0.000000
12/9/2011	1:42:16 PM	PHl3 MFC set to  0.000000
12/9/2011	1:42:16 PM	SiCl4 MFC set to  0.000000
12/9/2011	1:42:16 PM	Bypass solenoid MFC set to  0.000000
12/9/2011	1:42:16 PM	Tube furnace set to 50
12/9/2011	1:42:17 PM	Helium valve closed
12/9/2011	1:42:17 PM	BCl3 valve closed
12/9/2011	1:42:17 PM	PH3 valve closed
12/9/2011	1:42:17 PM	SiCl4 pre valve closed
12/9/2011	1:42:17 PM	SiCl4 post valve closed
12/9/2011	1:42:17 PM	Main Vac valve closed
12/9/2011	1:42:17 PM	Bypass valve closed
12/9/2011	1:42:17 PM	H2 valve opened
12/9/2011	1:42:17 PM	Bubbler valve opened
12/9/2011	1:42:17 PM	Helium MFC set to  0.000000
12/9/2011	1:42:17 PM	H2 MFC set to  500.000000
12/9/2011	1:42:17 PM	BCl3 MFC set to  0.000000
12/9/2011	1:42:17 PM	PHl3 MFC set to  0.000000
12/9/2011	1:42:17 PM	SiCl4 MFC set to  0.000000
12/9/2011	1:42:17 PM	Bypass solenoid MFC set to  0.000000
12/9/2011	1:42:18 PM	Tube furnace set to 1000
12/9/2011	2:05:18 PM	Helium valve closed
12/9/2011	2:05:18 PM	BCl3 valve closed
12/9/2011	2:05:18 PM	Main Vac valve closed
12/9/2011	2:05:18 PM	Bypass valve closed
12/9/2011	2:05:18 PM	H2 valve opened
12/9/2011	2:05:18 PM	PH3 valve opened
12/9/2011	2:05:18 PM	SiCl4 pre valve opened
12/9/2011	2:05:18 PM	SiCl4 post valve opened
12/9/2011	2:05:18 PM	Bubbler valve opened
12/9/2011	2:05:18 PM	Helium MFC set to  0.000000
12/9/2011	2:05:18 PM	H2 MFC set to  495.000000
12/9/2011	2:05:18 PM	BCl3 MFC set to  0.000000
12/9/2011	2:05:18 PM	PHl3 MFC set to  1.000000
12/9/2011	2:05:18 PM	SiCl4 MFC set to  30.000000
12/9/2011	2:05:18 PM	Bypass solenoid MFC set to  0.000000
12/9/2011	2:05:18 PM	Tube furnace set to 1000
12/9/2011	2:35:18 PM	Helium valve closed
12/9/2011	2:35:18 PM	BCl3 valve closed
12/9/2011	2:35:18 PM	PH3 valve closed
12/9/2011	2:35:18 PM	SiCl4 pre valve closed
12/9/2011	2:35:18 PM	SiCl4 post valve closed
12/9/2011	2:35:18 PM	Main Vac valve closed
12/9/2011	2:35:18 PM	Bypass valve closed
12/9/2011	2:35:18 PM	H2 valve opened
12/9/2011	2:35:18 PM	Bubbler valve opened
12/9/2011	2:35:18 PM	Helium MFC set to  0.000000
12/9/2011	2:35:18 PM	H2 MFC set to  480.000000
12/9/2011	2:35:18 PM	BCl3 MFC set to  0.000000
12/9/2011	2:35:18 PM	PHl3 MFC set to  0.000000
12/9/2011	2:35:18 PM	SiCl4 MFC set to  0.000000
12/9/2011	2:35:18 PM	Bypass solenoid MFC set to  0.000000
12/9/2011	2:35:18 PM	Tube furnace set to 750
12/9/2011	2:45:18 PM	H2 valve closed
12/9/2011	2:45:18 PM	BCl3 valve closed
12/9/2011	2:45:18 PM	PH3 valve closed
12/9/2011	2:45:18 PM	SiCl4 pre valve closed
12/9/2011	2:45:18 PM	SiCl4 post valve closed
12/9/2011	2:45:18 PM	Main Vac valve closed
12/9/2011	2:45:18 PM	Bypass valve closed
12/9/2011	2:45:18 PM	Helium valve opened
12/9/2011	2:45:18 PM	Bubbler valve opened
12/9/2011	2:45:18 PM	Helium MFC set to  400.000000
12/9/2011	2:45:18 PM	H2 MFC set to  0.000000
12/9/2011	2:45:18 PM	BCl3 MFC set to  0.000000
12/9/2011	2:45:18 PM	PHl3 MFC set to  0.000000
12/9/2011	2:45:18 PM	SiCl4 MFC set to  0.000000
12/9/2011	2:45:18 PM	Bypass solenoid MFC set to  0.000000
12/9/2011	2:45:18 PM	Tube furnace set to 0
12/9/2011	2:49:20 PM	Run aborted at 2:49 PM
12/9/2011	2:49:20 PM	Helium valve closed
12/9/2011	2:49:20 PM	H2 valve closed
12/9/2011	2:49:20 PM	BCl3 valve closed
12/9/2011	2:49:20 PM	PH3 valve closed
12/9/2011	2:49:20 PM	SiCl4 pre valve closed
12/9/2011	2:49:20 PM	SiCl4 post valve closed
12/9/2011	2:49:20 PM	Bypass valve closed
12/9/2011	2:49:20 PM	Main Vac valve closed
12/9/2011	2:49:20 PM	Bubbler valve closed
12/9/2011	2:49:20 PM	Helium MFC set to  0.000000
12/9/2011	2:49:20 PM	H2 MFC set to  0.000000
12/9/2011	2:49:20 PM	BCl3 MFC set to  0.000000
12/9/2011	2:49:20 PM	PHl3 MFC set to  0.000000
12/9/2011	2:49:20 PM	SiCl4 MFC set to  0.000000
12/9/2011	2:49:20 PM	Tube furnace set to 0
12/9/2011	2:51:17 PM	Bypass valve opened
12/9/2011	2:54:05 PM	Bypass valve closed
12/9/2011	2:54:05 PM	Main Vac valve opened
12/9/2011	2:55:48 PM	Helium MFC set to  20.000000
12/9/2011	2:55:49 PM	Helium valve opened
12/9/2011	2:58:41 PM	Helium valve closed
12/9/2011	2:59:04 PM	Recipe started at 2:59 PM
12/9/2011	2:59:04 PM	Helium valve closed
12/9/2011	2:59:04 PM	H2 valve closed
12/9/2011	2:59:04 PM	BCl3 valve closed
12/9/2011	2:59:04 PM	PH3 valve closed
12/9/2011	2:59:04 PM	SiCl4 pre valve closed
12/9/2011	2:59:04 PM	SiCl4 post valve closed
12/9/2011	2:59:04 PM	Bypass valve closed
12/9/2011	2:59:04 PM	Bubbler valve closed
12/9/2011	2:59:04 PM	Main Vac valve opened
12/9/2011	2:59:04 PM	Helium MFC set to  0.000000
12/9/2011	2:59:04 PM	H2 MFC set to  0.000000
12/9/2011	2:59:04 PM	BCl3 MFC set to  0.000000
12/9/2011	2:59:04 PM	PHl3 MFC set to  0.000000
12/9/2011	2:59:04 PM	SiCl4 MFC set to  0.000000
12/9/2011	2:59:04 PM	Bypass solenoid MFC set to  0.000000
12/9/2011	2:59:04 PM	Tube furnace set to 0
12/9/2011	3:59:04 PM	Helium valve closed
12/9/2011	3:59:04 PM	H2 valve closed
12/9/2011	3:59:04 PM	BCl3 valve closed
12/9/2011	3:59:04 PM	PH3 valve closed
12/9/2011	3:59:04 PM	SiCl4 pre valve closed
12/9/2011	3:59:04 PM	SiCl4 post valve closed
12/9/2011	3:59:04 PM	Main Vac valve closed
12/9/2011	3:59:04 PM	Bypass valve closed
12/9/2011	3:59:04 PM	Bubbler valve closed
12/9/2011	3:59:04 PM	Helium MFC set to  0.000000
12/9/2011	3:59:04 PM	H2 MFC set to  0.000000
12/9/2011	3:59:04 PM	BCl3 MFC set to  0.000000
12/9/2011	3:59:04 PM	PHl3 MFC set to  0.000000
12/9/2011	3:59:04 PM	SiCl4 MFC set to  0.000000
12/9/2011	3:59:04 PM	Bypass solenoid MFC set to  0.000000
12/9/2011	3:59:04 PM	Tube furnace set to 0
12/9/2011	3:59:07 PM	Helium valve closed
12/9/2011	3:59:07 PM	BCl3 valve closed
12/9/2011	3:59:07 PM	PH3 valve closed
12/9/2011	3:59:07 PM	SiCl4 pre valve closed
12/9/2011	3:59:07 PM	SiCl4 post valve closed
12/9/2011	3:59:07 PM	Main Vac valve closed
12/9/2011	3:59:07 PM	Bypass valve closed
12/9/2011	3:59:07 PM	Bubbler valve closed
12/9/2011	3:59:07 PM	H2 valve opened
12/9/2011	3:59:07 PM	Helium MFC set to  0.000000
12/9/2011	3:59:07 PM	H2 MFC set to  500.000000
12/9/2011	3:59:07 PM	BCl3 MFC set to  0.000000
12/9/2011	3:59:07 PM	PHl3 MFC set to  0.000000
12/9/2011	3:59:07 PM	SiCl4 MFC set to  0.000000
12/9/2011	3:59:07 PM	Bypass solenoid MFC set to  0.000000
12/9/2011	3:59:07 PM	Tube furnace set to 50
12/9/2011	4:00:10 PM	Helium valve closed
12/9/2011	4:00:10 PM	BCl3 valve closed
12/9/2011	4:00:10 PM	PH3 valve closed
12/9/2011	4:00:10 PM	SiCl4 pre valve closed
12/9/2011	4:00:10 PM	SiCl4 post valve closed
12/9/2011	4:00:10 PM	Main Vac valve closed
12/9/2011	4:00:10 PM	Bypass valve closed
12/9/2011	4:00:10 PM	H2 valve opened
12/9/2011	4:00:10 PM	Bubbler valve opened
12/9/2011	4:00:10 PM	Helium MFC set to  0.000000
12/9/2011	4:00:10 PM	H2 MFC set to  500.000000
12/9/2011	4:00:10 PM	BCl3 MFC set to  0.000000
12/9/2011	4:00:10 PM	PHl3 MFC set to  0.000000
12/9/2011	4:00:10 PM	SiCl4 MFC set to  0.000000
12/9/2011	4:00:10 PM	Bypass solenoid MFC set to  0.000000
12/9/2011	4:00:10 PM	Tube furnace set to 50
12/9/2011	4:00:11 PM	Helium valve closed
12/9/2011	4:00:11 PM	BCl3 valve closed
12/9/2011	4:00:11 PM	PH3 valve closed
12/9/2011	4:00:11 PM	SiCl4 pre valve closed
12/9/2011	4:00:11 PM	SiCl4 post valve closed
12/9/2011	4:00:11 PM	Main Vac valve closed
12/9/2011	4:00:11 PM	Bypass valve closed
12/9/2011	4:00:11 PM	H2 valve opened
12/9/2011	4:00:11 PM	Bubbler valve opened
12/9/2011	4:00:11 PM	Helium MFC set to  0.000000
12/9/2011	4:00:11 PM	H2 MFC set to  500.000000
12/9/2011	4:00:11 PM	BCl3 MFC set to  0.000000
12/9/2011	4:00:11 PM	PHl3 MFC set to  0.000000
12/9/2011	4:00:11 PM	SiCl4 MFC set to  0.000000
12/9/2011	4:00:11 PM	Bypass solenoid MFC set to  0.000000
12/9/2011	4:00:11 PM	Tube furnace set to 1000
12/9/2011	4:23:11 PM	Helium valve closed
12/9/2011	4:23:11 PM	BCl3 valve closed
12/9/2011	4:23:11 PM	Main Vac valve closed
12/9/2011	4:23:11 PM	Bypass valve closed
12/9/2011	4:23:11 PM	H2 valve opened
12/9/2011	4:23:11 PM	PH3 valve opened
12/9/2011	4:23:11 PM	SiCl4 pre valve opened
12/9/2011	4:23:11 PM	SiCl4 post valve opened
12/9/2011	4:23:11 PM	Bubbler valve opened
12/9/2011	4:23:11 PM	Helium MFC set to  0.000000
12/9/2011	4:23:11 PM	H2 MFC set to  495.000000
12/9/2011	4:23:11 PM	BCl3 MFC set to  0.000000
12/9/2011	4:23:11 PM	PHl3 MFC set to  1.000000
12/9/2011	4:23:11 PM	SiCl4 MFC set to  30.000000
12/9/2011	4:23:11 PM	Bypass solenoid MFC set to  0.000000
12/9/2011	4:23:11 PM	Tube furnace set to 1000
12/9/2011	4:53:11 PM	Helium valve closed
12/9/2011	4:53:11 PM	BCl3 valve closed
12/9/2011	4:53:11 PM	PH3 valve closed
12/9/2011	4:53:11 PM	SiCl4 pre valve closed
12/9/2011	4:53:11 PM	SiCl4 post valve closed
12/9/2011	4:53:11 PM	Main Vac valve closed
12/9/2011	4:53:11 PM	Bypass valve closed
12/9/2011	4:53:11 PM	H2 valve opened
12/9/2011	4:53:11 PM	Bubbler valve opened
12/9/2011	4:53:11 PM	Helium MFC set to  0.000000
12/9/2011	4:53:11 PM	H2 MFC set to  480.000000
12/9/2011	4:53:11 PM	BCl3 MFC set to  0.000000
12/9/2011	4:53:11 PM	PHl3 MFC set to  0.000000
12/9/2011	4:53:11 PM	SiCl4 MFC set to  0.000000
12/9/2011	4:53:11 PM	Bypass solenoid MFC set to  0.000000
12/9/2011	4:53:11 PM	Tube furnace set to 750
12/9/2011	5:03:11 PM	H2 valve closed
12/9/2011	5:03:11 PM	BCl3 valve closed
12/9/2011	5:03:11 PM	PH3 valve closed
12/9/2011	5:03:11 PM	SiCl4 pre valve closed
12/9/2011	5:03:11 PM	SiCl4 post valve closed
12/9/2011	5:03:11 PM	Main Vac valve closed
12/9/2011	5:03:11 PM	Bypass valve closed
12/9/2011	5:03:11 PM	Helium valve opened
12/9/2011	5:03:11 PM	Bubbler valve opened
12/9/2011	5:03:11 PM	Helium MFC set to  400.000000
12/9/2011	5:03:11 PM	H2 MFC set to  0.000000
12/9/2011	5:03:11 PM	BCl3 MFC set to  0.000000
12/9/2011	5:03:11 PM	PHl3 MFC set to  0.000000
12/9/2011	5:03:11 PM	SiCl4 MFC set to  0.000000
12/9/2011	5:03:11 PM	Bypass solenoid MFC set to  0.000000
12/9/2011	5:03:11 PM	Tube furnace set to 0
12/9/2011	5:26:52 PM	Run aborted at 5:26 PM
12/9/2011	5:26:52 PM	Helium valve closed
12/9/2011	5:26:52 PM	H2 valve closed
12/9/2011	5:26:52 PM	BCl3 valve closed
12/9/2011	5:26:52 PM	PH3 valve closed
12/9/2011	5:26:52 PM	SiCl4 pre valve closed
12/9/2011	5:26:52 PM	SiCl4 post valve closed
12/9/2011	5:26:52 PM	Bypass valve closed
12/9/2011	5:26:52 PM	Main Vac valve closed
12/9/2011	5:26:52 PM	Bubbler valve closed
12/9/2011	5:26:52 PM	Helium MFC set to  0.000000
12/9/2011	5:26:52 PM	H2 MFC set to  0.000000
12/9/2011	5:26:52 PM	BCl3 MFC set to  0.000000
12/9/2011	5:26:52 PM	PHl3 MFC set to  0.000000
12/9/2011	5:26:52 PM	SiCl4 MFC set to  0.000000
12/9/2011	5:26:52 PM	Tube furnace set to 0
12/9/2011	5:28:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/9/2011	5:28:43 PM	Recipe started at 5:28 PM
12/9/2011	5:28:43 PM	Helium valve closed
12/9/2011	5:28:43 PM	H2 valve closed
12/9/2011	5:28:43 PM	BCl3 valve closed
12/9/2011	5:28:43 PM	PH3 valve closed
12/9/2011	5:28:43 PM	SiCl4 pre valve closed
12/9/2011	5:28:43 PM	SiCl4 post valve closed
12/9/2011	5:28:43 PM	Main Vac valve closed
12/9/2011	5:28:43 PM	Bubbler valve closed
12/9/2011	5:28:43 PM	Bypass valve opened
12/9/2011	5:28:43 PM	Helium MFC set to  0.000000
12/9/2011	5:28:43 PM	H2 MFC set to  0.000000
12/9/2011	5:28:43 PM	BCl3 MFC set to  0.000000
12/9/2011	5:28:43 PM	PHl3 MFC set to  0.000000
12/9/2011	5:28:43 PM	SiCl4 MFC set to  0.000000
12/9/2011	5:28:43 PM	Bypass solenoid MFC set to  0.000000
12/9/2011	5:28:44 PM	Tube furnace set to 0
12/9/2011	5:29:44 PM	Helium valve closed
12/9/2011	5:29:44 PM	H2 valve closed
12/9/2011	5:29:44 PM	BCl3 valve closed
12/9/2011	5:29:44 PM	PH3 valve closed
12/9/2011	5:29:44 PM	SiCl4 pre valve closed
12/9/2011	5:29:44 PM	SiCl4 post valve closed
12/9/2011	5:29:44 PM	Main Vac valve closed
12/9/2011	5:29:44 PM	Bubbler valve closed
12/9/2011	5:29:44 PM	Bypass valve opened
12/9/2011	5:29:44 PM	Helium MFC set to  0.000000
12/9/2011	5:29:44 PM	H2 MFC set to  0.000000
12/9/2011	5:29:44 PM	BCl3 MFC set to  0.000000
12/9/2011	5:29:44 PM	PHl3 MFC set to  0.000000
12/9/2011	5:29:44 PM	SiCl4 MFC set to  0.000000
12/9/2011	5:29:44 PM	Bypass solenoid MFC set to  0.000000
12/9/2011	5:29:44 PM	Tube furnace set to 0
12/9/2011	5:30:44 PM	Helium valve closed
12/9/2011	5:30:44 PM	H2 valve closed
12/9/2011	5:30:44 PM	BCl3 valve closed
12/9/2011	5:30:44 PM	PH3 valve closed
12/9/2011	5:30:44 PM	SiCl4 pre valve closed
12/9/2011	5:30:44 PM	SiCl4 post valve closed
12/9/2011	5:30:44 PM	Bypass valve closed
12/9/2011	5:30:44 PM	Bubbler valve closed
12/9/2011	5:30:44 PM	Main Vac valve opened
12/9/2011	5:30:44 PM	Helium MFC set to  0.000000
12/9/2011	5:30:44 PM	H2 MFC set to  0.000000
12/9/2011	5:30:44 PM	BCl3 MFC set to  0.000000
12/9/2011	5:30:44 PM	PHl3 MFC set to  0.000000
12/9/2011	5:30:44 PM	SiCl4 MFC set to  0.000000
12/9/2011	5:30:44 PM	Bypass solenoid MFC set to  0.000000
12/9/2011	5:30:44 PM	Tube furnace set to 0
12/9/2011	5:30:45 PM	Run finished at 5:30 PM
12/9/2011	5:30:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
